Terahertz (THz) nanogap structures have emerged as versatile platforms for THz science and applications by virtue of their strong in-gap field enhancements and accompanying high levels of sensitivity to gap environments. However, despite their potential, reliable fabrication methods by which to create THz structures with sub-10 nm gaps remain limited. In this work, we fabricated THz split-ring resonator (SRR) arrays featuring a sub-10 nm split gap. Our fabrication method, involving photolithography, argon ion milling, and atomic layer deposition, is a high-throughput technique that is also applicable to the fabrication of other THz structures with sub-10 nm gaps. Through THz-time domain spectroscopy and a numerical simulation, we identified the fundamental magnetic resonances of the nanogap SRRs, at which the electric field enhancement factor is experimentally estimated to be around 7000. This substantial field enhancement makes SRRs with a sub-10 nm gap suitable for the study of high-field phenomena and related applications.

中文翻译：

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使用具有小于10 nm间隙的开口环谐振器来增强太赫兹场

太赫兹（THz）纳米间隙结构凭借其强大的间隙内场增强以及对间隙环境的高度敏感性，已经成为太赫兹科学和应用的通用平台。然而，尽管具有潜力，但是用于产生具有小于10nm的间隙的THz结构的可靠制造方法仍然受到限制。在这项工作中，我们制造了具有小于10 nm裂隙的THz裂环谐振器（SRR）阵列。我们的制造方法涉及光刻，氩离子铣削和原子层沉积，是一种高通量技术，也可用于制造间隙小于10 nm的其他THz结构。通过太赫兹时域光谱和数值模拟，我们确定了纳米间隙SRR的基本磁共振，