The quality of ruthenium (Ru) powders has a direct impact on the performance of sputtering Ru targets. This study employed spray granulation coupled with microwave calcination to prepare high-sphericity and uniform particle size Ru powders using ammonium hexachlororuthenate (IV) (AH). Spray granulation was applied to prepare AH powders with uniform particle size, high sphericity, and great dispersibility. AH@10, prepared by blending spherical AH powders and near-spherical Ru powders generated by microwave calcination at a mass ratio of 9:1, absorbs more microwaves than AH, which is promising for preparing Ru powders with faster and greater production than AH by microwave calcination. The response surface methodology (RSM) based on central composite design (CCD) was used to optimize the process of microwave calcination AH@10 in accordance with the thermal decomposition and self-reduction mechanism of AH. Three parallel verification experiments were performed under optimal microwave conditions (heating time 68.00 min, heating temperature 500 °C, and material mass 28 g), and the products were collected and characterized. The results show that the response surface model is accurate, and near-spherical Ru powder with high morphology was obtained after spray granulation and microwave calcination AH@10. This work is anticipated to produce Ru powders that could be used as a sputtering target in industry, as well as other high-performance metal powders.

钌 (Ru) 粉的质量直接影响溅射 Ru 靶材的性能。本研究采用喷雾造粒结合微波使用六氯钌酸铵 (IV) (AH) 煅烧制备球形度高且粒径均匀的 Ru 粉。采用喷雾造粒制备出粒径均匀、球形度高、分散性好的AH粉体。AH@10由球形AH粉和微波煅烧产生的近球形Ru粉以9:1的质量比混合制备，比AH吸收更多的微波，有望制备比AH更快、产量更高的Ru粉。微波煅烧。根据AH的热分解和自还原机理，采用基于中心组合设计（CCD）的响应面法（RSM）优化微波煅烧AH@10的工艺。在最佳微波条件下（加热时间 68. 00 min, 加热温度 500 °C, 物料质量 28 g), 收集产物并进行表征。结果表明，响应面模型准确，喷雾造粒和微波煅烧AH@10后得到近球形、形貌高的Ru粉。这项工作有望生产出可用作工业溅射靶材的 Ru 粉末，以及其他高性能金属粉末。