We extend the fabrication method of template-assisted metal dewetting (TeAMeD) to create near-infrared resonant nanostructures in an Au film without the need for etching or lift-off. TeAMeD has previously been used to generate high aspect-ratio sub-10 nm apertures, but struggles to generate larger apertures (>100 nm). In this work, we introduce a method to create larger apertures using templates consisting of fin-like patterns with radial symmetry. We also report evidence of grain boundary engineering, through the template pinning effect. Our three-dimensional phase field model of TeAMeD predicts both the grain-boundary pinning and aperture opening effects that agree well with experiments. Combined with simulation design, TeAMeD can be established as a grain engineering platform, allowing grain shape and boundary position to be controlled. Variations of template motif produce larger grains and numerous possible outcomes, including suspended Au nanodisks and triangular apertures.

中文翻译：

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通过模板辅助金属去湿处理短波红外共振的大孔径和晶界工程

我们扩展了模板辅助金属去湿（TeAMeD）的制造方法，以在Au膜中创建近红外共振纳米结构，而无需蚀刻或剥离。TeAMeD以前曾被用来产生高纵横比低于10 nm的孔径，但是却难以产生更大的孔径（> 100 nm）。在这项工作中，我们介绍了一种使用模板的方法来创建更大的孔径，该模板由具有径向对称性的鳍状图案组成。我们还通过模板钉扎效应报告了晶界工程的证据。我们的TeAMeD三维相场模型预测了晶界钉扎和开孔效果，这与实验非常吻合。结合仿真设计，可以将TeAMeD建立为谷物工程平台，从而控制晶粒形状和边界位置。