Searching strain sensitive materials for electronic skin is of crucial significance because of the restrictions of current materials such as poor electrical conductivity, large energy consumption, complex manufacturing process, and high cost. Here, we report a flexible strain sensor based on the Zr55Cu30Ni5Al10 metallic glass thin film which we name metallic glass skin. The metallic glass skin, synthesized by ion beam deposition, exhibits piezoresistance effects with a gauge factor of around 2.86, a large detectable strain range (∼1% or 180° bending angle), and good conductivity. Compared to other e-skin materials, the temperature coefficient of resistance of the metallic glass skin is extremely low (9.04 × 10−6 K−1), which is essential for the reduction in thermal drift. In addition, the metallic glass skin exhibits distinct antibacterial behavior desired for medical applications, also excellent reproducibility and repeatability (over 1000 times), nearly perfect linearity, low manufacturing cost, and neg...

中文翻译：

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基于金属玻璃薄膜的高性能柔性应变传感器

由于现有材料的导电性差、能耗大、制造工艺复杂、成本高等限制，寻找用于电子皮肤的应变敏感材料具有至关重要的意义。在这里，我们报告了一种基于 Zr55Cu30Ni5Al10 金属玻璃薄膜的柔性应变传感器，我们将其命名为金属玻璃皮。通过离子束沉积合成的金属玻璃表层表现出压阻效应，应变系数约为 2.86，可检测应变范围大（~1% 或 180° 弯曲角）和良好的导电性。与其他电子皮肤材料相比，金属玻璃皮肤的电阻温度系数极低（9.04 × 10−6 K−1），这对于减少热漂移至关重要。此外，