This study examined the catalytic properties of AlF₃ nanostructures for the hydrolysis of NF₃ discharged from semiconductor processes. Alumina being used as a catalyst for the hydrolysis of NF₃ was converted to AlF₃ by fluorination in the presence of NF₃ during a gas-solid chemical reaction. In general, AlF₃ has low catalytic activity in the hydrolysis of fluorinated compounds, but its catalytic activity varies according to its crystal structure. Commercial AlF₃ exhibited low catalytic activity in the hydrolysis of NF₃, whereas AlF₃ formed from the chemical reaction between NF₃ and alumina exhibited very high catalytic activity. Although alumina has high catalytic activity in the hydrolysis of NF₃, its activity decreases as it is converted to AlF₃ during the process. On the other hand, the activity test and X-ray diffraction showed that its catalytic activity is recovered as the nanocrystals of AlF₃ were grown. AlF₃ nanocrystals grown by the gas-solid chemical reaction showed a similar distribution of acid sites as the alumina. These acid sites provided the catalytic activity of AlF₃ in the hydrolysis of NF₃.

这项研究检查了AlF ₃纳米结构对从半导体工艺排出的NF ₃的水解的催化性能。在气固化学反应期间，在NF ₃的存在下，通过氟化将用作NF ₃水解催化剂的氧化铝转化为AlF ₃。通常，AlF ₃在氟化化合物的水解中具有低催化活性，但是其催化活性根据其晶体结构而变化。商业化的AlF ₃在NF ₃的水解中表现出较低的催化活性，而AlF ₃是由NF ₃之间的化学反应形成的氧化铝具有很高的催化活性。尽管氧化铝在NF ₃的水解中具有很高的催化活性，但由于在该过程中转化为AlF ₃，其活性会降低。另一方面，活性测试和X射线衍射表明，随着AlF ₃纳米晶体的生长，其催化活性得以恢复。通过气固化学反应生长的AlF ₃纳米晶体显示出与氧化铝相似的酸位分布。这些酸位提供了AlF ₃在NF ₃水解中的催化活性。