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Roughening and destructive effects of sintering on micron-sized ZnO features
Acta Materialia ( IF 9.4 ) Pub Date : 2017-12-01 , DOI: 10.1016/j.actamat.2017.09.034
Hong-fei Ju , Kaijie Ning , Kathy Lu

Abstract Microfabrication of ceramic features has become a critical issue in realizing the miniaturization of devices. Micron-sized ZnO features attract much attention because of their unique properties of direct wide bandgap, high exciton binding energy, good piezoelectrics, and easy doping for devices. However, limited effort has been devoted to understanding the sintering behaviors of micron-sized ZnO features. In this study, micron-sized ZnO ridges were prepared via centrifuge-aided micromolding and sintered at 950 °C for different time in air atmosphere. The sintering process destructs the ZnO ridges via abnormal grain growth and surface roughening. The relationship difference in grain growth vs. densification between the bulk and the features is elucidated, and gas evaporation during sintering is the major contributor to grain growth. Destruction prediction of ridge features using sintering time and bulk relative density is established based on grain growth and densification. Feature surface roughening is further analyzed with respect to thermodynamic fundamentals.

中文翻译:

烧结对微米级 ZnO 特征的粗糙化和破坏性影响

摘要 陶瓷特征的微细加工已成为实现器件小型化的关键问题。微米级 ZnO 特性因其直接宽带隙、高激子结合能、良好的压电性和易于器件掺杂的独特性质而备受关注。然而,致力于理解微米级 ZnO 特征的烧结行为的努力有限。在这项研究中,微米级 ZnO 脊是通过离心机辅助微成型制备的,并在 950 °C 下在空气中烧结不同时间。烧结过程通过异常晶粒生长和表面粗糙化破坏了 ZnO 脊。阐明了体积和特征之间晶粒生长与致密化的关系差异,并且烧结过程中的气体蒸发是晶粒生长的主要贡献者。使用烧结时间和体积相对密度的脊特征破坏预测是基于晶粒生长和致密化建立的。根据热力学基础进一步分析特征表面粗糙化。
更新日期:2017-12-01
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