We have developed a versatile nanocalorimeter sensor which allows imaging and electrical measurements of samples under different gaseous environments using the scanning electron microscope (SEM) and can simultaneously measure the sample temperature and associated heat of reaction. This new sensor consists of four independent heating/sensing elements for nanocalorimetry and eight electrodes for electrical measurements, all mounted on a 50 nm thick, 250 µm × 250 µm suspended silicon nitride membrane. This membrane is highly electron transparent and mechanically robust enabling in situ SEM observation under realistic temperatures, environmental conditions and pressures up to one atmosphere. To demonstrate this new capability, we report here on 1) in situ SEM-nanocalorimetry study of melting and solidification of polyethylene oxide, 2) the temperature dependence of conductivity of a nanowire; 3) the electron beam induced current measurements (EBID) of a nanowire in vacuum and air. Furthermore, the sensor is easily adaptable to operate in liquid environment and is compatible with most existing SEM. This versatile platform couples nanocalorimetry with in situ SEM imaging under various gaseous and liquid environments and is applicable to materials research, nanotechnology, energy, catalysis and biomedical applications.

中文翻译：

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用于扫描电子显微镜的带电触点的多环境纳米量热计

我们开发了一种多功能纳米量热计传感器，可以使用扫描电子显微镜 (SEM) 在不同气体环境下对样品进行成像和电学测量，并可以同时测量样品温度和相关的反应热。这种新型传感器由四个用于纳量热法的独立加热/传感元件和八个用于电气测量的电极组成，全部安装在 50 nm 厚、250 µm × 250 µm 悬浮氮化硅膜上。该膜具有高度电子透明性和机械强度，可在实际温度、环境条件和高达一个大气压的压力下进行原位 SEM 观察。为了证明这一新功能，我们在此报告 1) 聚环氧乙烷熔化和凝固的原位 SEM 纳米量热研究，2) 纳米线电导率的温度依赖性；3）真空和空气中纳米线的电子束感应电流测量（EBID）。此外，该传感器很容易适应在液体环境中运行，并且与大多数现有的 SEM 兼容。该多功能平台将纳米量热法与各种气体和液体环境下的原位 SEM 成像相结合，适用于材料研究、纳米技术、能源、催化和生物医学应用。