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New Heteroleptic Cobalt Precursors for Deposition of Cobalt-Based Thin Films
ACS Omega ( IF 4.1 ) Pub Date : 2017-09-06 00:00:00 , DOI: 10.1021/acsomega.7b00800
Seong Ho Han 1, 2 , Sheby Mary George 1 , Ga Yeon Lee 1 , Jeong Hwan Han 1 , Bo Keun Park 1 , Chang Gyoun Kim 1 , Seung Uk Son 2 , Myoung Soo Lah 3 , Taek-Mo Chung 1
Affiliation  

A new series of heteroleptic complexes of cobalt were synthesized using aminoalkoxide and β-diketonate ligands. The complexes, [Co(dmamp)(acac)]2 (3), [Co(dmamp)(tfac)]2 (4), [Co(dmamp)(hfac)]2 (5), [Co(dmamp)(tmhd)]2 (6), and [Co(dmamb)(tmhd)]2 (7), were prepared by two-step substitution reactions and studied using Fourier transform infrared spectroscopy, mass spectrometry, elemental analysis, and thermogravimetric analysis (TGA). Complexes 37 displayed dimeric molecular structures for all of the complexes with cobalt metal centers interconnected by μ2-O bonding by the alkoxy oxygen atom. TGA and a thermal study of the complexes displayed high volatilities and stabilities for complexes 6 and 7, with sublimation temperatures of 120 °C/0.5 Torr and 130 °C/0.5 Torr, respectively.

中文翻译:

用于沉积钴基薄膜的新型异钴钴前体

使用氨基醇盐和β-二酮酸酯配体合成了一系列钴的新型杂配物。络合物[Co(dmamp)(acac)] 23),[Co(dmamp)(tfac)] 24),[Co(dmamp)(hfac)] 25),[Co(dmamp) (tmhd)] 26)和[Co(dmamb)(tmhd)] 27),是通过两步取代反应制备的,并使用傅里叶变换红外光谱,质谱,元素分析和热重分析进行了研究( TGA)。配合物37显示二聚体分子结构为所有与钴金属中心由μ互连的复合物2通过烷氧基的氧原子键合-O。TGA和配合物的热研究表明配合物67的挥发性和稳定性高,升华温度分别为120°C / 0.5 Torr和130°C / 0.5 Torr。
更新日期:2017-09-06
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