Mechanical strength is an essential parameter that influences and limits the lifetime performance of antireflective (AR) coatings in optical devices. Specifically, amphiphobic AR coatings with reduced reflectance are of great significance as they considerably enlarge the range of fundamental applications. Herein, we describe the design and fabrication of amphiphobic AR coatings with reduced reflectance and enhanced mechanical resilience. Introducing a thin polytetrafluoroethylene (PTFE) layer on top of the bilayer SiO₂ coating via vapor deposition method makes it highly liquid repellent. We achieved reduced reflectance (< 1%) over the entire visible wavelength range, as well as tunability according to the desired wavelength region. The fabricated film showed better thermal stability (up to 300 °C) with stable AR efficiency, when an ultrathin dense coat of Al₂O₃ was deposited via atomic layer deposition (ALD) on the polymer-based bilayer SiO₂ antireflective coating (P-BSAR). The experimental results prove that the omnidirectional AR coating in this study exhibits multifunctional properties and should be suitable for the production of protective optical equipment and biocompatible polymer films for the displays of portable electronic devices.

中文翻译：

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机械坚固的抗反射涂层

机械强度是影响和限制光学设备中抗反射（AR）涂层的使用寿命的重要参数。具体地说，反射率降低的两性增透膜具有重要意义，因为它们大大扩大了基本应用范围。在这里，我们描述了具有降低的反射率和增强的机械弹性的两亲性AR涂层的设计和制造。在双层SiO _2的顶部引入一个薄的聚四氟乙烯（PTFE）层通过气相沉积法进行的涂层使其具有很高的拒液性。我们在整个可见波长范围内实现了降低的反射率（<1％），以及根据所需波长区域的可调性。所制造的膜显示出更好的热稳定性（高达300℃）下具有稳定的AR效率，当Al的超薄稠密涂层₂ ö ₃经由原子层沉积（ALD）沉积的聚合物为基础的双层的SiO ₂抗反射涂层（P -BSAR）。实验结果证明，本研究中的全向增透膜具有多功能性，应适合用于生产便携式电子设备显示器的保护性光学设备和生物相容性聚合物薄膜。