Stretchable electronic sensing devices are defining the path toward wearable electronics. High performance flexible strain sensors attached on clothing or human skin are required for potential applications in the entertainment, health monitoring, and medical care sectors. In this work, conducting copper electrodes were fabricated on polydimethylsiloxane as sensitive stretchable microsensors by integrating laser direct writing and transfer printing approaches. The copper electrode was reduced from copper salt using laser writing rather than the general approach of printing with pre-synthesized copper or copper oxide nanoparticles. An electrical resistivity of 96 μΩ cm was achieved on 40 μm-thick Cu electrodes on flexible substrates. The motion sensing functionality successfully demonstrated a high sensitivity and mechanical robustness. This in-situ fabrication method leads to a path toward electronic devices on flexible substrates.

可伸缩的电子传感设备正在定义可穿戴电子设备的发展道路。娱乐，健康监测和医疗保健领域的潜在应用需要安装在衣服或人体皮肤上的高性能柔性应变传感器。在这项工作中，通过集成激光直接写入和转移印刷方法，在聚二甲基硅氧烷上制作了导电铜电极作为敏感的可拉伸微传感器。使用激光书写，而不是使用预先合成的铜或氧化铜纳米粒子进行印刷的一般方法，可以从铜盐中还原出铜电极。在柔性基板上的40μm厚的Cu电极上实现了96μΩcm的电阻率。运动感应功能成功展示出高灵敏度和机械坚固性。